TY  - JOUR
AU  - Michael Gaitan
C2  - Future Fab International
DA  - 2013-01-30
LA  - en
M1  - 44
PB  - Future Fab International
PY  - 2013
TI  - ITRS Chapter: MEMS
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913266
ER  -