Holm, J.
and Caplins, B.
(2020),
Introduction to STEM-in-SEM Part 1: Imaging and Diffraction with Common Commercially Available Transmission Detectors, Electronic Device Failure Analysis, [online], https://doi.org/10.31399/asm.tb.stemsem.t56000001
(Accessed October 9, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Introduction to STEM-in-SEM Part 1: Imaging and Diffraction with Common Commercially Available Transmission Detectors
Published
Author(s)
,
Citation
Electronic Device Failure Analysis
Pub Type
Journals
Download Paper
Keywords
scanning electron microscopy, STEM-in-SEM, transmission SEM
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created March 11, 2020, Updated September 25, 2020