Holm, J.
and Caplins, B.
(2020),
Introduction to STEM-in-SEM Part 1: Imaging and Diffraction with Common Commercially Available Transmission Detectors, Electronic Device Failure Analysis, [online], https://doi.org/10.31399/asm.tb.stemsem.t56000001
(Accessed April 23, 2024)
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Introduction to STEM-in-SEM Part 1: Imaging and Diffraction with Common Commercially Available Transmission Detectors
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Electronic Device Failure Analysis
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Journals
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Keywords
scanning electron microscopy, STEM-in-SEM, transmission SEM
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Created March 11, 2020, Updated September 25, 2020