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Internet-Based Surface Metrology Algorithm Testing System
Published
Author(s)
Son H. Bui, Thomas B. Renegar, Theodore V. Vorburger, Jayaraman Raja, Mark C. Malburg
Abstract
This paper presents the development of an Internet-based surface metrology algorithm testing system. The system includes peer-reviewed surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a web site at the National Institute of Standards and Technology (NIST), USA. Companies, universities, and instrument manufacturers have Internet access to standard data sets and analysis tools located on a NIST server. The system serves to validate the accuracy of algorithms as well as the calculation of surface parameters in industry.
Bui, S.
, Renegar, T.
, Vorburger, T.
, Raja, J.
and Malburg, M.
(2004),
Internet-Based Surface Metrology Algorithm Testing System, Wear
(Accessed December 11, 2023)