Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Interlaboratory study on linewidth measurements for antireflective chromium photomasks:

Published

Author(s)

John M Jerke, M Carroll Croarkin, Ruth N Varner
Citation
- NBS SP 400-74
Report Number
NBS SP 400-74

Citation

Jerke, J. , Croarkin, M. and Varner, R. (1982), Interlaboratory study on linewidth measurements for antireflective chromium photomasks:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-74 (Accessed May 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1982, Updated May 19, 2023