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Imaging Optics and CCD Camera Characterization for Metrology

Published

Author(s)

S Fox, Edward A. Kornegay, Richard M. Silver

Abstract

Optical semiconductor characterization and metrology rely heavily on digital camera imaging and its associated optical imaging systems. This work characterizes the performance of a widely used, commercially available camera and compares its performance to that of the art digital camera. It is shown that well corrected lens systems may still exhibit high spatial frequency variations leading to errors of several nanometers for a 1 micrometer pitch measurement. Methods for mapping and correction of such errors are also presented.
Proceedings Title
Proceedings of American Institute of Physics
Conference Location
, USA

Keywords

CCD camera, metrology, overlay, self-calibration

Citation

Fox, S. , Kornegay, E. and Silver, R. (2017), Imaging Optics and CCD Camera Characterization for Metrology, Proceedings of American Institute of Physics, , USA (Accessed June 13, 2024)

Issues

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Created February 19, 2017