A high-throughput system that consists of a combinatorial tool (a sputtering deposition tool and a pulsed laser deposition tool) and two property screening devices, developed at NIST, was used for thermoelectric material exploration. The thermoelectric power factor (S2, S=Seebeck coefficient, electrical conductivity screening device allows us to measure electrical conductivity and Seebeck coefficient of over 1000 sample-points within 6 hours. The thermal effusivity measurement system using the frequency domain thermoreflectance technique allows us to screen thermal conductivity of combinatorial/conventional films. Illustrations of applications are provided with a Co-Sn-Ce/Si(100) film for power factor determination and with a Ba2YCu3O7/SrTiO3(100) film for thermal conductivity derivation.
Citation: Japanese Journal of Applied Physics
Pub Type: Journals
Thermoconductivity screening tool, Combinatorial films, power factor screening tool