High Throughput Characterization of the Optical Properties of Compositionally Graded Combinatorial Films
Peter K. Schenck, Debra L. Kaiser, Albert Davydov
Compositionally graded combinatorial films have been characterized by a high throughput automated spectroscopic reflectometer. The data from this instrument were used to map the thickness and index of refraction of the compositionally varying films. Combinatorial films produced by dual-beam dual target pulsed laser deposition and characterized with the reflectometer include the BaTiO3-Sr TiO3 system on silicon (dielectric and ferroelectric films). In addition, combinatorial Au/Ni electrical contacts on a n-GaN/sapphire produced by e-beam vaporization have been characterized with the spectroscopic reflectometer. The Au/Ni/n-GaN/sapphire structures were characterized both as-deposited and after annealing at 400 C for 60s in flowing argon.
Applied Surface Science
combinatorial, opltical properties, reflectometry, thin films
, Kaiser, D.
and Davydov, A.
High Throughput Characterization of the Optical Properties of Compositionally Graded Combinatorial Films, Applied Surface Science
(Accessed December 6, 2023)