Padilla, A.
, Watson, A.
, Holloway, C.
and Booth, J.
(2015),
HIGH-Q ON-CHIP MICROWAVE RESONATOR FOR SENSITIVE PERMITTIVITY DETECTION IN NANOLITER VOLUMES, 18th International Conference on Solid-State Sensors, Actuators and Microsystems Transducers 2015 , Anchorage, AK, US, [online], https://doi.org/10.1109/TRANSDUCERS.2015.7181262
(Accessed March 13, 2025)
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HIGH-Q ON-CHIP MICROWAVE RESONATOR FOR SENSITIVE PERMITTIVITY DETECTION IN NANOLITER VOLUMES
Published
Author(s)
, Alex Watson, ,
Abstract
This work presents the design, fabrication and characterization results for a thick film (6µm Cu), coplanar waveguide (CPW) resonator operating at 2.2GHz with a high Q (177), integrated with a microfluidic channel. We demonstrate detection of changes in permittivity of 0.8% with a sample volume of 30nL, and estimate a lower detection limit of 0.05% (500ppm) with this device. Detection of such minute changes in dielectric properties enables a multitude of micro biological characterization, including distinguishing living versus dead cells [1], quantifying cell or particle numbers [3], and free-solution biosensing of proteins and biomolecules [4].Conference Dates
June 21-25, 2015
Conference Location
Anchorage, AK, US
Conference Title
18th International Conference on Solid-State Sensors, Actuators and Microsystems Transducers 2015
Pub Type
Conferences
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Keywords
Lab-on-a-chip, microfluidics, coplanar waveguide, RF resonator, permittivity detection
Citation
Issues
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Created June 20, 2015, Updated October 12, 2021