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High-Level CAD Melds Micromachined Devices with Foundries

Published

Author(s)

Janet M. Cassard, M. Parameswaran, Mona E. Zaghloul, Michael Gaitan
Citation
NIST Interagency/Internal Report (NISTIR) -
Volume
4845

Citation

Cassard, J. , Parameswaran, M. , Zaghloul, M. and Gaitan, M. (1992), High-Level CAD Melds Micromachined Devices with Foundries, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed July 23, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created April 30, 1992, Updated October 12, 2021