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Grating Pitch Measurements with the Molecular Measuring Machine

Published

Author(s)

John A. Kramar, C Villarrubia, E C. Teague, W Scire, William B. Penzes
Proceedings Title
Proceedings of SPIE Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks Conference
Volume
3806
Conference Dates
November 21-1, 1999
Conference Location
Denver, CO
Conference Title
SPIE Recent Advances in Metrology, Characterization and Standards for Optical Digital Data Disks Conference

Keywords

measurements, molecualr measuring machine

Citation

Kramar, J. , Villarrubia, C. , Teague, E. , Scire, W. and Penzes, W. (1999), Grating Pitch Measurements with the Molecular Measuring Machine, Proceedings of SPIE Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks Conference, Denver, CO (Accessed May 19, 2024)

Issues

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Created November 1, 1999, Updated February 19, 2017