Hargis, P.
(1994),
The Gaseous Electronics Conference radio-frequency reference cell: a defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma processing discharges, Review of Scientific Instruments
(Accessed April 26, 2024)
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The Gaseous Electronics Conference radio-frequency reference cell: a defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma processing discharges
Published
Author(s)
P J. Hargis, Jr, K E. Greenberg, P A. Miller, J B. Gerardo, J R. Torczynski, M E. Riley, G A. Hebner, , , J R. Whet-stone, R R. Van brunt, M A. Sobolewski, H M. Anderson, M P. Splichal, J L. Mock, P Bletzinger, A Garscadden, R A. Gottscho, G Selwyn, M Dalvie, J E. Heidenreich, J W. Butter-baugh, M L. Brake, M L. Passow, J Pender, A Lujan, M E. Elta, D Graves, H H. Sawin, M J. Kuschner, J T. Verdeyen, R Horwath, T R. Turner
Citation
Review of Scientific Instruments
Volume
65
Pub Type
Journals
Citation
Created December 31, 1993, Updated October 12, 2021