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The Gaseous Electronics Conference radio-frequency reference cell: a defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma processing discharges

Published

Author(s)

P J. Hargis, Jr, K E. Greenberg, P A. Miller, J B. Gerardo, J R. Torczynski, M E. Riley, G A. Hebner, J R. Roberts, James K. Olthoff, J R. Whet-stone, R R. Van brunt, M A. Sobolewski, H M. Anderson, M P. Splichal, J L. Mock, P Bletzinger, A Garscadden, R A. Gottscho, G Selwyn, M Dalvie, J E. Heidenreich, J W. Butter-baugh, M L. Brake, M L. Passow, J Pender, A Lujan, M E. Elta, D Graves, H H. Sawin, M J. Kuschner, J T. Verdeyen, R Horwath, T R. Turner
Citation
Review of Scientific Instruments
Volume
65

Citation

Hargis, P. (1994), The Gaseous Electronics Conference radio-frequency reference cell: a defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma processing discharges, Review of Scientific Instruments (Accessed April 24, 2024)
Created December 31, 1993, Updated October 12, 2021