TY  - JOUR
AU  - P Hargis
C2  - Review of Scientific Instruments
DA  - 1994-01-01 00:01:00
LA  - en
M1  - 65
PB  - Review of Scientific Instruments
PY  - 1994
TI  - The Gaseous Electronics Conference radio-frequency reference cell: a defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma processing discharges
ER  -