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Friction and Wear in Micro and Nanomachines



Maarten P. de Boer, Alex D. Corwin, Frank W. DelRio, W R. Ashurst


Friction and wear present both challenges and opportunities for micro- and nanosystems. In the sections that follow, we will describe theoretical underpinnings of multi-asperity friction, micromachined test structures to measure friction, and monolayer coatings that have been used to reduce friction on MEMS devices. Then, we will concentrate on metrology and friction results using the nanotractor coated with one particular monolayer. We shall see that rich behavior, such as adhesion dominated by van der Waals forces, contact aging (and the ability to suppress it) and a motion bifurcation, occur.
Springer Handbook of Nanotechnology, Third Edition
Publisher Info
Springer Verlag, New York, NY


friction, MEMS, tribology, wear


de Boer, M. , Corwin, A. , DelRio, F. and Ashurst, W. (2010), Friction and Wear in Micro and Nanomachines, Springer Verlag, New York, NY, [online], (Accessed April 21, 2024)
Created August 1, 2010, Updated October 12, 2021