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PUBLICATIONS

Friction and Wear in Micro and Nanomachines

Published

Author(s)

Maarten P. de Boer, Alex D. Corwin, Frank W. DelRio, W R. Ashurst

Abstract

Friction and wear present both challenges and opportunities for micro- and nanosystems. In the sections that follow, we will describe theoretical underpinnings of multi-asperity friction, micromachined test structures to measure friction, and monolayer coatings that have been used to reduce friction on MEMS devices. Then, we will concentrate on metrology and friction results using the nanotractor coated with one particular monolayer. We shall see that rich behavior, such as adhesion dominated by van der Waals forces, contact aging (and the ability to suppress it) and a motion bifurcation, occur.
Citation
Springer Handbook of Nanotechnology, Third Edition
Publisher Info
Springer Verlag, New York, NY
Pub Type
Books

Download Paper

Local Download

Keywords

friction, MEMS, tribology, wear
Semiconductors

Citation

de Boer, M. , Corwin, A. , DelRio, F. and Ashurst, W. (2010), Friction and Wear in Micro and Nanomachines, Springer Verlag, New York, NY, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854100 (Accessed October 14, 2025)

Issues

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Created August 1, 2010, Updated October 12, 2021
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