Skip to main content

NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Frequency-selective contrast on variably doped p-type silicon with a scanning microwave microscope

Published

Author(s)

Atif A. Imtiaz, Thomas M. Wallis, SangHyun S. Lim, H. Tanbakuchi, H-P Huber, A. Hornung, P. Hinterdorfer, J. Smoliner, F. Kienberger, Pavel Kabos

Abstract

We report frequency dependent contrast in d(S11)/dV measurements of a variably doped p-type silicon sample in the frequency range from 2GHz to 18GHz. The measurements were conducted bys use of a scanning microwave microscope. The measurements were done at a selected frequency by varying the DC tip voltage. The measured d(S11)/dV signal shows maximum for doping concentrations of 10(u)15 (d)- 10(u)16(d)cm(up)03(d) at 2.3 GHz and this maximum sequentially shifts through the regions of increasing dopant concentration displaying maximum for concentrations of 10(u)17(d)-10(u)18(d)cm(up)-3(d) at 17.9 GHz.
Citation
Applied Physics Letters
Volume
111
Issue
9

Citation

Imtiaz, A. , Wallis, T. , Lim, S. , Tanbakuchi, H. , Huber, H. , Hornung, A. , Hinterdorfer, P. , Smoliner, J. , Kienberger, F. and Kabos, P. (2012), Frequency-selective contrast on variably doped p-type silicon with a scanning microwave microscope, Applied Physics Letters, [online], https://doi.org/10.1063/1.4716026 (Accessed October 9, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created May 14, 2012, Updated January 27, 2020
Was this page helpful?