Molenbroek, E.
, Mahan, A.
, Johnson, E.
and Gallagher, A.
(1996),
Film quality in relation to deposition conditions of a-Si:H films deposited by the 'hot wire' method using highly diluted silane, Journal of Applied Physics
(Accessed May 5, 2024)
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Film quality in relation to deposition conditions of a-Si:H films deposited by the 'hot wire' method using highly diluted silane
Published
Author(s)
E C. Molenbroek, A H. Mahan, E J. Johnson, A C. Gallagher
Citation
Journal of Applied Physics
Volume
79
Pub Type
Journals
Citation
Created January 1, 1996, Updated February 17, 2017