@article{118406,
  author = {E Molenbroek and A Mahan and E Johnson and A Gallagher},
  title = {Film quality in relation to deposition conditions of a-Si:H films deposited by the 'hot wire' method using highly diluted silane},
  year = {1996},
  number = {79},
  month = {1996-01-01},
  publisher = {Journal of Applied Physics},
  language = {en},
}