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Fiber Optic Based Optical Tomography Sensor for Monitoring Plasma Uniformity

Published

Author(s)

Eric C. Benck, K Etemadi

Abstract

A new type of fiber optic based optical tomography sensor has been developed for potential in situ monitoring of plasma uniformity. Optical tomography inverts optical emission measurements into the actual plasma distribution without assuming radial symmetry. The new sensor is designed to operate with only two small windows and acquire the necessary data in less than a second. Optical tomography is being tested on an ICP-GEC RF plasma source. Variations in plasma uniformity are measured as a function of different plasma conditions.
Proceedings Title
Characterization and Metrology for ULSI Technology 2000, International Conference | | Characterization and Metrology for ULSI Technology | AIP
Volume
550
Conference Dates
June 26-29, 2000
Conference Title
AIP Conference Proceedings

Keywords

diagnostic, optical emission, plasma uniformity, tomography

Citation

Benck, E. and Etemadi, K. (2001), Fiber Optic Based Optical Tomography Sensor for Monitoring Plasma Uniformity, Characterization and Metrology for ULSI Technology 2000, International Conference | | Characterization and Metrology for ULSI Technology | AIP (Accessed April 21, 2024)
Created February 1, 2001, Updated February 17, 2017