@conference{172166,
  author = {Eric Benck and K Etemadi},
  title = {Fiber Optic Based Optical Tomography Sensor for Monitoring Plasma Uniformity},
  year = {2001},
  number = {550},
  month = {2001-02-01},
  publisher = {Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology | AIP},
  language = {en},
}