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Fast C2D: Software for Extracting 2D Carrier Profiles from Scanning Capacitance Microscopy Images

Published

Author(s)

Brian G. Rennex, Joseph Kopanski, Jay F. Marchiando
Proceedings Title
Characterization and Metrology for ULSI Technology
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA

Citation

Rennex, B. , Kopanski, J. and Marchiando, J. (2001), Fast C2D: Software for Extracting 2D Carrier Profiles from Scanning Capacitance Microscopy Images, Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA (Accessed June 23, 2024)

Issues

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Created January 31, 2001, Updated October 12, 2021