Rennex, B.
, Kopanski, J.
and Marchiando, J.
(2001),
Fast C2D: Software for Extracting 2D Carrier Profiles from Scanning Capacitance Microscopy Images, Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
(Accessed October 6, 2024)
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Fast C2D: Software for Extracting 2D Carrier Profiles from Scanning Capacitance Microscopy Images
Published
Author(s)
, ,
Proceedings Title
Characterization and Metrology for ULSI Technology
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 31, 2001, Updated October 12, 2021