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PUBLICATIONS

Fast C2D: Software for Extracting 2D Carrier Profiles from Scanning Capacitance Microscopy Images

Published

Author(s)

Brian G. Rennex, Joseph Kopanski, Jay F. Marchiando
Proceedings Title
Characterization and Metrology for ULSI Technology
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences

Citation

Rennex, B. , Kopanski, J. and Marchiando, J. (2001), Fast C2D: Software for Extracting 2D Carrier Profiles from Scanning Capacitance Microscopy Images, Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA (Accessed October 15, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 31, 2001, Updated October 12, 2021
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