@conference{772921,
  author = {Brian Rennex and Joseph Kopanski and Jay Marchiando},
  title = {Fast C2D: Software for Extracting 2D Carrier Profiles from Scanning Capacitance Microscopy Images},
  year = {2001},
  month = {2001-02-01 00:02:00},
  publisher = {Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA},
  language = {en},
}