Fabrication and Electron Microprobe Characterization of Barium-Strontium-Titanate (BST) Films

Published

February 1, 2001

Author(s)

Ryna B. Marinenko, J T. Armstrong, Debra L. Kaiser, Joseph J. Ritter, Peter K. Schenck, C P. Bouldin, J Blendell, Igor Levin

Abstract

Barium strontium titanate (BST) thin films of varying composition and thickness (5nm to 400nm) on (100)Si or Pt/(100)Si substrates were measured using an electron microprobe analyzer with wavelength dispersive x-ray spectrometers. Most of the films were fabricated at NIST by a metalorganic deposition approach. Several films from external sources that were fabricated by sputtering or metalorganic chemical vapor deposition were also measured. For some of the films, the compositions determined by electron microprobe were in reasonably good agreement with the nominal compositions provided by the film suppliers. However, for other films, including the thinnest ones, there were large discrepancies between the measured and nominal compositions. Thicknesses obtained from the microprobe analysis are compared with values measured by other techniques.

Proceedings Title

Characterization and Metrology for ULSI Technology, International Conference | | AIP Conference Proceeding #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP

Volume

550

Conference Dates

June 26-29, 2000

Conference Location

Gaithersburg, MD

Conference Title

AIP Conference Proceedings

Pub Type

Conferences

Keywords

Barium Strontium Titanate, BST thin films, Electron Probe Microanalysis, film thickness

Citation

Marinenko, R. , Armstrong, J. , Kaiser, D. , Ritter, J. , Schenck, P. , Bouldin, C. , Blendell, J. and Levin, I. (2001), Fabrication and Electron Microprobe Characterization of Barium-Strontium-Titanate (BST) Films, Characterization and Metrology for ULSI Technology, International Conference | | AIP Conference Proceeding #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP, Gaithersburg, MD (Accessed October 20, 2025)