@conference{105741,
  author = {Ryna Marinenko and J Armstrong and Debra Kaiser and Joseph Ritter and Peter Schenck and C Bouldin and J Blendell and Igor Levin},
  title = {Fabrication and Electron Microprobe Characterization of Barium-Strontium-Titanate (BST) Films},
  year = {2001},
  number = {550},
  month = {2001-02-01},
  publisher = {Characterization and Metrology for ULSI Technology, International Conference | | AIP Conference Proceeding #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP, Gaithersburg, MD},
  language = {en},
}