TY  - CONF
AU  - Ryna Marinenko
AU  - J Armstrong
AU  - Debra Kaiser
AU  - Joseph Ritter
AU  - Peter Schenck
AU  - C Bouldin
AU  - J Blendell
AU  - Igor Levin
C2  - Characterization and Metrology for ULSI Technology, International Conference | | AIP Conference Proceeding #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP, Gaithersburg, MD
DA  - 2001-02-01
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology, International Conference | | AIP Conference Proceeding #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP, Gaithersburg, MD
PY  - 2001
TI  - Fabrication and Electron Microprobe Characterization of Barium-Strontium-Titanate (BST) Films
ER  -