Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Extreme Ultraviolet Metrology at SURF III

Published

Author(s)

Charles S. Tarrio, Robert E. Vest, S Grantham, Thomas B. Lucatorto

Abstract

The last two decades have seen the development normal-incidence multiplayer mirrors and semiconductor photodiodes for extreme ultraviolet (EUV) radiation. Applications such as in astrophysics, lithography, and plasma physics, require precise calibrations of the associated instrumentation.
Citation
Synchrotron Radiation News
Volume
14

Keywords

extreme ultraviolet, metrology, radiometry, reflectometry, source-based radiometry

Citation

Tarrio, C. , Vest, R. , Grantham, S. and Lucatorto, T. (2001), Extreme Ultraviolet Metrology at SURF III, Synchrotron Radiation News (Accessed March 5, 2024)
Created January 1, 2001, Updated February 17, 2017