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Charles S. Tarrio, Robert E. Vest, S Grantham, Thomas B. Lucatorto
Abstract
The last two decades have seen the development normal-incidence multiplayer mirrors and semiconductor photodiodes for extreme ultraviolet (EUV) radiation. Applications such as in astrophysics, lithography, and plasma physics, require precise calibrations of the associated instrumentation.
Tarrio, C.
, Vest, R.
, Grantham, S.
and Lucatorto, T.
(2001),
Extreme Ultraviolet Metrology at SURF III, Synchrotron Radiation News
(Accessed May 31, 2023)