Dagata, J.
(1997),
Evaluation of Scanning Maxwell-Stress Microscopy for SPM-Based Nanoelectronics, Program of the 4th Industrial Applications of Scanned Probe Microscopy; NIST, Gaithersburg, MD, 1997; and Nanotechnology 8: A3-A9, Special Issue, September 1997, Gaithersburg, MD
(Accessed January 19, 2025)
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Evaluation of Scanning Maxwell-Stress Microscopy for SPM-Based Nanoelectronics
Published
Author(s)
Abstract
A preliminary evaluation of the compatibility, spatial resolution, and sensitivity of scanning Maxwell-stress microscopy (SMM) as an in situ diagnostic technique for SPM oxidation of silicon is presented. These results indicate that SMM will provide us with a more detailed understanding of the reaction mechanism which occurs in the high field conditions at the tip-sample junction during SPM oxidation. SMM also appears to be a promising technique for simultaneously investigating dimensional and electrical properties of molecular distributions within highly complex micro-environments such as phase-separated polymer systems.Proceedings Title
Program of the 4th Industrial Applications of Scanned Probe Microscopy; NIST, Gaithersburg, MD, 1997; and Nanotechnology 8: A3-A9, Special Issue, September 1997
Conference Location
Gaithersburg, MD
Pub Type
Conferences
Keywords
nanofabrication, phase-separated polymers, scanned probe microscopy, scanning Maxwell-stress microscopy
Citation
Issues
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Created September 1, 1997, Updated February 19, 2017