TY  - CONF
AU  - John Dagata
C2  - Program of the 4th Industrial Applications of Scanned Probe Microscopy; NIST, Gaithersburg, MD, 1997; and Nanotechnology 8: A3-A9, Special Issue, September 1997, Gaithersburg, MD
DA  - 1997-09-01
LA  - en
PB  - Program of the 4th Industrial Applications of Scanned Probe Microscopy; NIST, Gaithersburg, MD, 1997; and Nanotechnology 8: A3-A9, Special Issue, September 1997, Gaithersburg, MD
PY  - 1997
TI  - Evaluation of Scanning Maxwell-Stress Microscopy for SPM-Based Nanoelectronics
ER  -