@conference{191266, author = {John Dagata}, title = {Evaluation of Scanning Maxwell-Stress Microscopy for SPM-Based Nanoelectronics}, year = {1997}, month = {1997-09-01}, publisher = {Program of the 4th Industrial Applications of Scanned Probe Microscopy; NIST, Gaithersburg, MD, 1997; and Nanotechnology 8: A3-A9, Special Issue, September 1997, Gaithersburg, MD}, language = {en}, }