Vest, R.
(2011),
EUV metrology at NIST SURF III for lithography, astronomy, solar physics, and particle detection applications, 262nd PTB Seminar: EUV Metrology, [online], http://www.euv2011.ptb.de/euv2011/euv-home.html
(Accessed April 19, 2024)
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EUV metrology at NIST SURF III for lithography, astronomy, solar physics, and particle detection applications
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Abstract
The National Institute of Standards and Technology (NIST) operates the Synchrotron Ultraviolet Radiation Facility (SURF III) to support a number of applications of extreme ultraviolet radiation. SURF III is a 400 MeV electron storage ring that can operate in a number of special modes optimized for radiometry and metrology. In this talk, I will describe the synchrotron radiation facility and some of the recent applications, including photoresist contamination characterization, absorption spectroscopy of BF3 for neutron detection, low-flux calibration of photomultiplier tubes, calibration of space-based instrumentation, and our transfer standard photodiode program for dissemination of the U.S. national scale of detector responsivity in the EUV.Citation
262nd PTB Seminar: EUV Metrology
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Keywords
SURF III, metrology, reflectometry, photoabsorption, calibration
Citation
Created November 27, 2011, Updated February 19, 2017