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EUV metrology at NIST SURF III for lithography, astronomy, solar physics, and particle detection applications

Published

Author(s)

Robert E. Vest

Abstract

The National Institute of Standards and Technology (NIST) operates the Synchrotron Ultraviolet Radiation Facility (SURF III) to support a number of applications of extreme ultraviolet radiation. SURF III is a 400 MeV electron storage ring that can operate in a number of special modes optimized for radiometry and metrology. In this talk, I will describe the synchrotron radiation facility and some of the recent applications, including photoresist contamination characterization, absorption spectroscopy of BF3 for neutron detection, low-flux calibration of photomultiplier tubes, calibration of space-based instrumentation, and our transfer standard photodiode program for dissemination of the U.S. national scale of detector responsivity in the EUV.
Citation
262nd PTB Seminar: EUV Metrology

Keywords

SURF III, metrology, reflectometry, photoabsorption, calibration

Citation

Vest, R. (2011), EUV metrology at NIST SURF III for lithography, astronomy, solar physics, and particle detection applications, 262nd PTB Seminar: EUV Metrology, [online], http://www.euv2011.ptb.de/euv2011/euv-home.html (Accessed January 27, 2022)
Created November 27, 2011, Updated February 19, 2017