@misc{misc,
  author = {Robert Vest},
  title = {EUV metrology at NIST SURF\&$\#$160;III for lithography, astronomy, solar physics, and particle detection applications},
  year = {2011},
  month = {2011-11-27 00:11:00},
  publisher = {262nd PTB Seminar: EUV Metrology},
  language = {en},
}