Enhancing the Platinum Atomic Layer Deposition Infiltration Depth inside Anodic Alumina Nanoporous Membrane

Published

December 18, 2014

Author(s)

Amit Vaish, Susan T. Krueger, Michael Dimitriou, Charles Majkrzak, David J. Vanderah, Lei Chen, Klaus Gawrisch

Abstract

Platinum nanotubular membrane can be straightforwardly fabricated by Pt coating the inside of anodic alumina membranes (AAO) using atomic layer deposition (ALD). However, the high-aspect-ratio of AAO makes ALD very challenging. By tuning the process temperature and precursor exposure time for ALD, enhanced conformal coating and infiltration depth of the deposited Pt was achieved inside the AAO templates. Cross-sectional scanning electron microscopy/energy dispersive X-ray spectroscopy and small angle neutron scattering were employed to analyze the Pt coverage and thickness inside the AAO nanopores, respectively. Additionally, one application of platinum nanotubular membrane was demonstrated by creating a high-density protein-functionalized interface.

Citation

Journal of Vacuum Science & Technology A

Volume

33

Issue

1

Pub Type

Journals

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Keywords

Anodic alumina membranes, platinum, atomic layer deposition, small-angle neutron scattering, x-ray reflectometry, biosensors

Citation

Vaish, A. , Krueger, S. , Dimitriou, M. , Majkrzak, C. , Vanderah, D. , Chen, L. and Gawrisch, K. (2014), Enhancing the Platinum Atomic Layer Deposition Infiltration Depth inside Anodic Alumina Nanoporous Membrane, Journal of Vacuum Science & Technology A, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916571 (Accessed September 30, 2025)