Vaish, A.
, Krueger, S.
, Dimitriou, M.
, Majkrzak, C.
, Vanderah, D.
, Chen, L.
and Gawrisch, K.
(2014),
Enhancing the Platinum Atomic Layer Deposition Infiltration Depth inside Anodic Alumina Nanoporous Membrane, Journal of Vacuum Science & Technology A, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916571
(Accessed October 11, 2025)
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Enhancing the Platinum Atomic Layer Deposition Infiltration Depth inside Anodic Alumina Nanoporous Membrane
Published
Author(s)
Amit Vaish, , Michael Dimitriou, , , , Klaus Gawrisch
Abstract
Platinum nanotubular membrane can be straightforwardly fabricated by Pt coating the inside of anodic alumina membranes (AAO) using atomic layer deposition (ALD). However, the high-aspect-ratio of AAO makes ALD very challenging. By tuning the process temperature and precursor exposure time for ALD, enhanced conformal coating and infiltration depth of the deposited Pt was achieved inside the AAO templates. Cross-sectional scanning electron microscopy/energy dispersive X-ray spectroscopy and small angle neutron scattering were employed to analyze the Pt coverage and thickness inside the AAO nanopores, respectively. Additionally, one application of platinum nanotubular membrane was demonstrated by creating a high-density protein-functionalized interface.Citation
Journal of Vacuum Science & Technology A
Volume
33
Issue
1
Pub Type
Journals
Download Paper
Keywords
Anodic alumina membranes, platinum, atomic layer deposition, small-angle neutron scattering, x-ray reflectometry, biosensors
Citation
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Created December 17, 2014, Updated October 12, 2021