@article{788956,
  author = {Amit Vaish and Susan Krueger and Michael Dimitriou and Charles Majkrzak and David Vanderah and Lei Chen and Klaus Gawrisch},
  title = {Enhancing the Platinum Atomic Layer Deposition Infiltration Depth inside Anodic Alumina Nanoporous Membrane},
  year = {2014},
  number = {33},
  month = {2014-12-18 00:12:00},
  publisher = {Journal of Vacuum Science & Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916571},
  language = {en},
}