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Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed
Published
Author(s)
J Bodycomb, D P. DeWitt, W A. Kimes, K G. Kreider, Benjamin K. Tsai
Proceedings Title
12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004
Conference Dates
September 28-30, 2004
Conference Location
Portland, OR, USA
Conference Title
Proc. the 12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004
Pub Type
Conferences
Citation
Bodycomb, J.
, DeWitt, D.
, Kimes, W.
, Kreider, K.
and Tsai, B.
(2004),
Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed, 12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004 , Portland, OR, USA
(Accessed October 8, 2025)