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Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed

Published

Author(s)

J Bodycomb, D P. DeWitt, W A. Kimes, K G. Kreider, Benjamin K. Tsai
Proceedings Title
12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004
Conference Dates
September 28-30, 2004
Conference Location
Portland, OR, USA
Conference Title
Proc. the 12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004

Citation

Bodycomb, J. , DeWitt, D. , Kimes, W. , Kreider, K. and Tsai, B. (2004), Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed, 12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004 , Portland, OR, USA (Accessed October 15, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 2003, Updated October 12, 2021