Bodycomb, J.
, DeWitt, D.
, Kimes, W.
, Kreider, K.
and Tsai, B.
(2004),
Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed, 12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004 , Portland, OR, USA
(Accessed May 4, 2024)
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Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed
Published
Author(s)
J Bodycomb, , W A. Kimes, K G. Kreider,
Proceedings Title
12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004
Conference Dates
September 28-30, 2004
Conference Location
Portland, OR, USA
Conference Title
Proc. the 12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004
Pub Type
Conferences
Citation
Created December 31, 2003, Updated October 12, 2021