TY  - CONF
AU  - J Bodycomb
AU  - D DeWitt
AU  - W Kimes
AU  - K Kreider
AU  - Benjamin Tsai
C2  - 12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004 , Portland, OR, USA
DA  - 2004-01-01 00:01:00
LA  - en
PB  - 12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004 , Portland, OR, USA
PY  - 2004
TI  - Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed
ER  -