@conference{832591,
  author = {J Bodycomb and D DeWitt and W Kimes and K Kreider and Benjamin Tsai},
  title = {Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed},
  year = {2004},
  month = {2004-01-01 00:01:00},
  publisher = {12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004 , Portland, OR, USA},
  language = {en},
}