Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed

Published

Author(s)

Benjamin K. Tsai, J Bodycomb, D P. DeWitt, K G. Kreider, W A. Kimes
Citation
12th IEEE Int'l Conf Advanced Thermal Processing - RTP 2004

Citation

Tsai, B. , Bodycomb, J. , DeWitt, D. , Kreider, K. and Kimes, W. (2004), Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed, 12th IEEE Int'l Conf Advanced Thermal Processing - RTP 2004 (Accessed March 4, 2024)
Created January 1, 2004, Updated February 17, 2017