Tsai, B.
, Bodycomb, J.
, DeWitt, D.
, Kreider, K.
and Kimes, W.
(2004),
Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed, 12th IEEE Int'l Conf Advanced Thermal Processing - RTP 2004
(Accessed April 26, 2024)
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Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed
Published
Author(s)
, J Bodycomb, , K G. Kreider, W A. Kimes
Citation
12th IEEE Int'l Conf Advanced Thermal Processing - RTP 2004
Pub Type
Journals
Citation
Created January 1, 2004, Updated February 17, 2017