@article{article,
  author = {Benjamin Tsai and J Bodycomb and D DeWitt and K Kreider and W Kimes},
  title = {Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed},
  year = {2004},
  month = {2004-01-01},
  publisher = {12th IEEE Int{\textquoteright}l Conf Advanced Thermal Processing - RTP 2004},
  language = {en},
}