TY  - JOUR
AU  - Benjamin Tsai
AU  - J Bodycomb
AU  - D DeWitt
AU  - K Kreider
AU  - W Kimes
C2  - 12th IEEE Int'l Conf Advanced Thermal Processing - RTP 2004
DA  - 2004-01-01
LA  - en
PB  - 12th IEEE Int'l Conf Advanced Thermal Processing - RTP 2004
PY  - 2004
TI  - Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed
ER  -