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PUBLICATIONS

Ellipsometry SRM's for Use in Thin Film Measurements

Published

Author(s)

Deane Chandler-Horowitz, Jay F. Marchiando, Barbara J. Belzer
Proceedings Title
Proc., Measurement Science Conference
Conference Dates
February 8-9, 1990
Conference Location
Anaheim, CA, USA
Pub Type
Conferences

Citation

Chandler-Horowitz, D. , Marchiando, J. and Belzer, B. (1990), Ellipsometry SRM's for Use in Thin Film Measurements, Proc., Measurement Science Conference, Anaheim, CA, USA (Accessed October 21, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1990, Updated October 12, 2021
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