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Ellipsometry SRM's for Use in Thin Film Measurements

Published

Author(s)

Deane Chandler-Horowitz, Jay F. Marchiando, Barbara J. Belzer
Proceedings Title
Proc., Measurement Science Conference
Conference Dates
February 8-9, 1990
Conference Location
Anaheim, CA, USA

Citation

Chandler-Horowitz, D. , Marchiando, J. and Belzer, B. (1990), Ellipsometry SRM's for Use in Thin Film Measurements, Proc., Measurement Science Conference, Anaheim, CA, USA (Accessed July 14, 2024)

Issues

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Created December 30, 1990, Updated October 12, 2021