@conference{767876,
  author = {Deane Chandler-Horowitz and Jay Marchiando and Barbara Belzer},
  title = {Ellipsometry SRM's for Use in Thin Film Measurements},
  year = {1990},
  month = {1990-12-31 00:12:00},
  publisher = {Proc., Measurement Science Conference, Anaheim, CA, USA},
  language = {en},
}