TY  - CONF
AU  - Chandler-Horowitz, Deane
AU  - Marchiando, Jay
AU  - Belzer, Barbara
C2  - Proc., Measurement Science Conference, Anaheim, CA, USA
DA  - 1990-12-31 00:12:00
LA  - en
PB  - Proc., Measurement Science Conference, Anaheim, CA, USA
PY  - 1990
TI  - Ellipsometry SRM's for Use in Thin Film Measurements
ER  -