Electron Transmission Measurements of Electron Mean Free Path in Supported Thin Films from 1-5 keV
Measurements are made of the transmission of medium energy electrons through in vacuo deposited films in order to determine the inelastic electron mean free path as a function of energy. Films of Al, Ge and Au are deposited in small increments on 20-30 ¿ carbon substrates supported by "holey" carbon films. The no-loss electron current is measured for each thickness as a continuous function of incident energy in the range of 1-5 keV. Although this preliminary experiment does not result in a precise separation of elastic and inelastic scattering effects, the attenuation lengths estimated are in reasonable agreement with measured and calculated in-elastic mean free paths. Elastic scattering cross sections appear to be smaller than estimated by simple theory.