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Electron-excited X-ray Microanalysis by Energy Dispersive Spectrometry at 50: Analytical Accuracy, Precision, Trace Sensitivity, and Quantitative Compositional Mapping
Published
Author(s)
Dale E. Newbury, Nicholas Ritchie
Abstract
2018 marks the 50th anniversary of the introduction of energy dispersive X-ray spectrometry (EDS) with semiconductor detectors to electron-excited X-ray microanalysis. Initially useful for qualitative analysis, EDS has developed into a fully quantitative analytical tool that can match wavelength dispersive spectrometry (WDS) for accuracy in the determination of major (mass concentration C > 0.1) and minor (0.01 ≤ C ≤ 0.1) constituents even when severe peak interference occurs, and practical measurements can extend well into the trace (e.g., 0.0005 < C < 0.01) constituent range. Useful accuracy is possible for low atomic number elements (Li, Be, B, C, N, O, and F). By recording a full EDS spectrum at each picture element of a scan, comprehensive quantitative compositional mapping can be performed.
Newbury, D.
and Ritchie, N.
(2019),
Electron-excited X-ray Microanalysis by Energy Dispersive Spectrometry at 50: Analytical Accuracy, Precision, Trace Sensitivity, and Quantitative Compositional Mapping, Microscopy and Microanalysis, [online], https://doi.org/10.1017/S143192761901482X, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927336
(Accessed October 6, 2025)