Electron-excited X-ray Microanalysis by Energy Dispersive Spectrometry at 50: Analytical Accuracy, Precision, Trace Sensitivity, and Quantitative Compositional Mapping

Published

August 1, 2019

Author(s)

Dale E. Newbury, Nicholas Ritchie

Abstract

2018 marks the 50th anniversary of the introduction of energy dispersive X-ray spectrometry (EDS) with semiconductor detectors to electron-excited X-ray microanalysis. Initially useful for qualitative analysis, EDS has developed into a fully quantitative analytical tool that can match wavelength dispersive spectrometry (WDS) for accuracy in the determination of major (mass concentration C > 0.1) and minor (0.01 ≤ C ≤ 0.1) constituents even when severe peak interference occurs, and practical measurements can extend well into the trace (e.g., 0.0005 < C < 0.01) constituent range. Useful accuracy is possible for low atomic number elements (Li, Be, B, C, N, O, and F). By recording a full EDS spectrum at each picture element of a scan, comprehensive quantitative compositional mapping can be performed.

Citation

Microscopy and Microanalysis

Volume

25

Pub Type

Journals

Download Paper

https://doi.org/10.1017/S143192761901482X

Local Download

Keywords

electron-excited X-ray microanalysis, elemental analysis, energy dispersive X-ray spectrometry, quantitative analysis, scanning electron microscopy

Citation

Newbury, D. and Ritchie, N. (2019), Electron-excited X-ray Microanalysis by Energy Dispersive Spectrometry at 50: Analytical Accuracy, Precision, Trace Sensitivity, and Quantitative Compositional Mapping, Microscopy and Microanalysis, [online], https://doi.org/10.1017/S143192761901482X, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927336 (Accessed October 9, 2025)