Kopanski, J.
and You, L.
(2019),
Electric Field Gradient Reference Material for Scanning Probe Microscopy, Proceedings of the 2019 International Conference on Frontiers of Characterization and Metrology
for Nanoelectronics, Monterey, CA, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927329
(Accessed April 18, 2024)
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Electric Field Gradient Reference Material for Scanning Probe Microscopy
Published
Author(s)
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Abstract
Any eSPM measurement of a spatially varying electric field at the surface of a sample has a large uncertainty due to the unknown details of the tip shape near the surface. We have designed an electric field gradient reference sample to provide an unambiguous known reference sample of transitions in electric field over small distances. Since all dimensions and materials of the reference sample are known, the electric field at the surface can be calculated precisely. This will allow the sources of error in the measured signal to be determined as a function of tip shape and measurement conditions. The reference also functions as a method of calibrating scanning Kelvin force microscopy (SKFM) to improve its accuracy and to make calibrated measurements on unknowns.Proceedings Title
Proceedings of the 2019 International Conference on Frontiers of Characterization and Metrology
for Nanoelectronics
for Nanoelectronics
Conference Dates
April 2-4, 2019
Conference Location
Monterey, CA, US
Pub Type
Conferences
Download Paper
Keywords
Electric field, electrical scanning probe microscopy, eSPM, reference material, standards for SPM
Citation
Created March 31, 2019, Updated April 14, 2022