Nieto, M.
, Allain, J.
, Titov, V.
, Hendricks, M.
, Hassanein, A.
, Rokusek, D.
, Chrobak, C.
, Tarrio, C.
, Barad, Y.
, Grantham, S.
, Lucatorto, T.
and Rice, B.
(2006),
Effect of xenon bombardment on ruthenium coated grazing incidence collector lifetime for EUV lithography,, Journal of Applied Physics
(Accessed December 14, 2024)
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Effect of xenon bombardment on ruthenium coated grazing incidence collector lifetime for EUV lithography,
Published
Author(s)
M Nieto, J P. Allain, V Titov, M R. Hendricks, A Hassanein, D Rokusek, C Chrobak, , , , , Bryan Rice
Citation
Journal of Applied Physics
Volume
100
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 2005, Updated October 12, 2021