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Effect of xenon bombardment on ruthenium coated grazing incidence collector lifetime for EUV lithography,

Published

Author(s)

M Nieto, J P. Allain, V Titov, M R. Hendricks, A Hassanein, D Rokusek, C Chrobak, Charles Tarrio, Yaniv Barad, Steven Grantham, Thomas B. Lucatorto, Bryan Rice
Citation
Journal of Applied Physics
Volume
100

Citation

Nieto, M. , Allain, J. , Titov, V. , Hendricks, M. , Hassanein, A. , Rokusek, D. , Chrobak, C. , Tarrio, C. , Barad, Y. , Grantham, S. , Lucatorto, T. and Rice, B. (2006), Effect of xenon bombardment on ruthenium coated grazing incidence collector lifetime for EUV lithography,, Journal of Applied Physics (Accessed February 22, 2024)
Created December 31, 2005, Updated October 12, 2021