The Effect of Gaussian Filter Long Wavelength Cutoff in Topography Comparisons and Measurements
Jun-Feng Song, Lijun Ma, Theodore V. Vorburger
Five parameters are used for 2D and 3D topography comparisons and measurements, those include two correlation parameters Ds and CCFmax , and three surface parameters: the r-m-s roughness Rq (or Sq for 3D), r-m-s waviness Wq and Gaussian filter long wavelength cutoff. Their functional relationship is theoretically and experimentally investigated. It is suggested to use a ratio between Rq (or Sq) and Wq for the optimum selection of the cutoff, by which the roughness topography can be unambiguously extracted from the waviness and form deviations for topography comparisons and measurements.
Proceedings of 2006 American Society of Precision Engineering
, Ma, L.
and Vorburger, T.
The Effect of Gaussian Filter Long Wavelength Cutoff in Topography Comparisons and Measurements, Proceedings of 2006 American Society of Precision Engineering, Monterey, CA
(Accessed December 7, 2023)