Nembach, H.
, Shaw, J.
, Taylor, C.
and Gopman, D.
(2022),
Effect of gas composition during Pt sputtering on structural and magnetic properties of CoFeB thin films, IEEE Magnetics Letters, [online], https://doi.org/10.1109/LMAG.2022.3225742, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935410
(Accessed October 27, 2025)
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Effect of gas composition during Pt sputtering on structural and magnetic properties of CoFeB thin films
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Abstract
Ultrathin CoFeB films in Ta/CoFeB/Pt trilayer structures were exposed to Pt overlayer deposition in Ar, Kr and Xe working gas environments during direct current magnetron sputtering. The root-mean-squared roughness at the CoFeB/Pt interface rose from 1.1 nm to 1.3 nm to 1.7 nm when replacing Ar with Kr or Xe as the working gas, respectively. Significant effects on the Gilbert damping and the interfacial Dzyaloshinskii-Moriya interaction (DMI) energy were observed, with increases in the damping from 0.037(1) to 0.042(1) to 0.048(1), and reductions in the interfacial DMI from 0.47(4) mJ/m2 to 0.45(5) mJ/m2 to 0.39(4) mJ/m2.Citation
IEEE Magnetics Letters
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Created December 13, 2022, Updated March 6, 2023