Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Effect of gas composition during Pt sputtering on structural and magnetic properties of CoFeB thin films

Published

Author(s)

Hans Nembach, Justin Shaw, Chloe Taylor, Daniel Gopman

Abstract

Ultrathin CoFeB films in Ta/CoFeB/Pt trilayer structures were exposed to Pt overlayer deposition in Ar, Kr and Xe working gas environments during direct current magnetron sputtering. The root-mean-squared roughness at the CoFeB/Pt interface rose from 1.1 nm to 1.3 nm to 1.7 nm when replacing Ar with Kr or Xe as the working gas, respectively. Significant effects on the Gilbert damping and the interfacial Dzyaloshinskii-Moriya interaction (DMI) energy were observed, with increases in the damping from 0.037(1) to 0.042(1) to 0.048(1), and reductions in the interfacial DMI from 0.47(4) mJ/m2 to 0.45(5) mJ/m2 to 0.39(4) mJ/m2.
Citation
IEEE Magnetics Letters

Citation

Nembach, H. , Shaw, J. , Taylor, C. and Gopman, D. (2022), Effect of gas composition during Pt sputtering on structural and magnetic properties of CoFeB thin films, IEEE Magnetics Letters, [online], https://doi.org/10.1109/LMAG.2022.3225742, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935410 (Accessed June 17, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 13, 2022, Updated March 6, 2023