@article{932071, author = {Hans Nembach and Justin Shaw and Chloe Taylor and Daniel Gopman}, title = {Effect of gas composition during Pt sputtering on structural and magnetic properties of CoFeB thin films}, year = {2022}, month = {2022-12-13 05:12:00}, publisher = {IEEE Magnetics Letters}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935410}, doi = {https://doi.org/10.1109/LMAG.2022.3225742}, language = {en}, }