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Dual Ion Beam Assisted Deposition for Multilayer Production

Published

Author(s)

J Pedulla, A Bartos, R Deslattes
Citation
Physics of X-Ray Multilayer Structures 1994 Technical Digest Series
Volume
6
Publisher Info
Optical Society of America, Washington,

Citation

Pedulla, J. , Bartos, A. and Deslattes, R. (1994), Dual Ion Beam Assisted Deposition for Multilayer Production, Optical Society of America, Washington, (Accessed April 25, 2024)
Created January 1, 1994, Updated February 17, 2017