TY  - SER
AU  - J Pedulla
AU  - A Bartos
AU  - R Deslattes
C2  - Optical Society of America, Washington, 
DA  - 1994-01-01
LA  - en
M1  - 6
PB  - Optical Society of America, Washington, 
PY  - 1994
TI  - Dual Ion Beam Assisted Deposition for Multilayer Production
ER  -