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Documentation for Reference Material (RM) 8820 : A Versatile, Multipurpose Dimensional Metrology Calibration Standard for Scanned Particle Beam, Scanned Probe and Optical Microscopy:

Published

Author(s)

Michael T. Postek, Andras E. Vladar, Bin Ming, Benjamin Bunday
Citation
- NIST SP 1170
Report Number
NIST SP 1170

Citation

Postek, M. , Vladar, A. , Ming, B. and Bunday, B. (2014), Documentation for Reference Material (RM) 8820 : A Versatile, Multipurpose Dimensional Metrology Calibration Standard for Scanned Particle Beam, Scanned Probe and Optical Microscopy:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.1170 (Accessed February 21, 2024)
Created March 1, 2014, Updated May 20, 2023