Postek, M.
, Vladar, A.
, Ming, B.
and Bunday, B.
(2014),
Documentation for Reference Material (RM) 8820 : A Versatile, Multipurpose Dimensional Metrology Calibration Standard for Scanned Particle Beam, Scanned Probe and Optical Microscopy:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.1170
(Accessed December 15, 2024)
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Documentation for Reference Material (RM) 8820 : A Versatile, Multipurpose Dimensional Metrology Calibration Standard for Scanned Particle Beam, Scanned Probe and Optical Microscopy:
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- NIST SP 1170
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NIST SP 1170
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NIST Pubs
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Created March 1, 2014, Updated May 20, 2023